Handbook of Ion Beam Processing Technology: Principles, Deposition, Film Modification and Synthesis
Series: Materials Science and Process Technology
Deals with ion beam processing for basic sputter etching of samples, sputter deposition of thin films, the synthesis of material in thin film form, and the modification of the properties of thin films.
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English
Hardback
Deals with ion beam processing for basic sputter etching of samples, sputter deposition of thin films, the synthesis of material in thin film form, and the modification of the properties of thin films.
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