New challenges are emerging for plasma-based processes as we shift from thin film technology to nanotechnology. Offering numerous examples of plasma processing of nanomaterials, this book provides an in-depth overview of recent advances in this crucial area, as well as threats to its development. Addressing both experimental and theoretical aspects of plasma processing technology, the author illustrates examples of its successful application in nanoelectronics, catalysis, energy sensors, nanomedicine, and several other fields.