This chapter describes the nature of clean and contaminated diamond surfaces, Chemical-vapor-deposited (CVD) diamond film deposition technology, analytical techniques and the results of research on CVD diamond films, and the general properties of CVD diamond films. Further, it describes the friction and wear properties of CVD diamond films in the atmosphere, in a controlled nitrogen environment, and in an ultra-high-vacuum environment.Miyoshi, KazuhisaGlenn Research CenterDIAMOND FILMS; TRIBOLOGY; DIAMONDS; VAPOR DEPOSITION; FRICTION; WEAR; ULTRAHIGH VACUUM; NITROGEN; CONTROLLED ATMOSPHERES; LUBRICATION; COATINGS; SURFACE ROUGHNESS...