High-precision, two-dimensional planar motion is often required in the manufacturing industry. Switched Reluctance (SR) motor has a simple and robust structure. However, due to its highly nonlinear characteristics, it has not been used in direct-drive, planar motion applications. The aim of this book is to investigate the feasibility of employing SR technology for two-dimensional, high-precision, position control applications. After a thorough performance prediction from finite element analysis, a planar motor prototype is built. In order to fully understand the behavior of the prototype, detailed characterization experiments have been carried out. After reviewing various modeling techniques, the nonlinear characteristics are explored and a model suitable for the planar motor prototype is established. Although some motor parameters are still required to be optimized, the novel and unique direct-drive planar SR machine is capable of achieving high-precision position and trajectory control under selected control algorithms.